公开(公告)号：US11441220B2

公开(公告)日：2022-09-13

申请号：US17010535

申请日：2020-09-02

Applicant: Samsung Display Co., Ltd.

Inventor： Kookchol Park ,  Suhyun Oh ,  Sokwon Noh

IPC: C23C14/24 ,  H01L33/00 ,  H01L51/56

Abstract: A deposition apparatus may include a chamber, a crucible in the chamber, a cover part covering the crucible, and 2n nozzles (where ‘n’ is a positive integer number) protruding from the cover part and arranged in a first direction. Among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle.

公开(公告)号：US10396282B2

公开(公告)日：2019-08-27

申请号：US15668071

申请日：2017-08-03

Applicant: Samsung Display Co., Ltd.

Inventor： Sangshin Lee ,  Kookchol Park

IPC: H01L51/00 ,  H01L51/56 ,  C23C16/04

Abstract: A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly includes a frame including an opening, and a mask having first and second ends in a length direction thereof coupled to the frame, in which the mask includes a main body part having a first thickness and including a pattern part, the pattern part including pattern holes through which the deposition material passes and a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.

公开(公告)号：US11171317B2

公开(公告)日：2021-11-09

申请号：US16777262

申请日：2020-01-30

Applicant: Samsung Display Co., Ltd.

Inventor： Suhyun Oh ,  Haram Yoo ,  Sangyeol Kim ,  Sokwon Noh ,  Kookchol Park

IPC: H01L51/56 ,  H01L27/32 ,  H01L51/52 ,  H01L51/00

Abstract: A method of manufacturing a display apparatus includes: preparing a substrate including a display area and a sensor area arranged in the display area; forming first counter electrodes on the substrate so that the first counter electrodes are spaced apart from one another in the sensor area to have a first pattern; depositing second counter electrodes having a second pattern different from the first pattern to be spaced apart from one another in the sensor area; and arranging a component to correspond to the sensor area.

公开(公告)号：US09666346B2

公开(公告)日：2017-05-30

申请号：US14659684

申请日：2015-03-17

Applicant: Samsung Display Co., Ltd.

Inventor： Sokwon Noh ,  Kookchol Park

IPC: H01F7/02 ,  C23C14/04

CPC classification number: H01F7/021 ,  C23C14/042

Abstract: Disclosed is a magnet plate assembly that includes a plurality of magnetic bodies, each magnetic body having a first surface formed to correspond to a flat surface of a substrate and to contact the flat surface of the substrate and a second surface formed in a different direction from that of the first surface, and a support frame which supports the plurality of magnetic bodies and has a plurality of grooves in which the plurality of magnetic bodies are respectively seated.