Invention Grant
- Patent Title: Magnet plate assembly, deposition apparatus including the same, and method of deposition using the same
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Application No.: US14659684Application Date: 2015-03-17
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Publication No.: US09666346B2Publication Date: 2017-05-30
- Inventor: Sokwon Noh , Kookchol Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0135960 20141008
- Main IPC: H01F7/02
- IPC: H01F7/02 ; C23C14/04

Abstract:
Disclosed is a magnet plate assembly that includes a plurality of magnetic bodies, each magnetic body having a first surface formed to correspond to a flat surface of a substrate and to contact the flat surface of the substrate and a second surface formed in a different direction from that of the first surface, and a support frame which supports the plurality of magnetic bodies and has a plurality of grooves in which the plurality of magnetic bodies are respectively seated.
Public/Granted literature
- US20160104561A1 MAGNET PLATE ASSEMBLY, DEPOSITION APPARATUS INCLUDING THE SAME, AND METHOD OF DEPOSITION USING THE SAME Public/Granted day:2016-04-14
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