Magnet plate assembly, deposition apparatus including the same, and method of deposition using the same
Abstract:
Disclosed is a magnet plate assembly that includes a plurality of magnetic bodies, each magnetic body having a first surface formed to correspond to a flat surface of a substrate and to contact the flat surface of the substrate and a second surface formed in a different direction from that of the first surface, and a support frame which supports the plurality of magnetic bodies and has a plurality of grooves in which the plurality of magnetic bodies are respectively seated.
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