公开(公告)号：US11351632B2

公开(公告)日：2022-06-07

申请号：US16191575

申请日：2018-11-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaebum Pahk ,  Jeongho Yi ,  Dokyun Kwon ,  Kyongho Hong ,  Jihun Kang ,  Cheollae Roh ,  Gyoowan Han

IPC: B23K26/142 ,  B23K26/14 ,  B23K26/16 ,  B23K26/38 ,  B23K26/402 ,  B23K37/04 ,  B23K101/36

Abstract: A particle removal device includes: a stage on which a target substrate is disposed; an inner case defining a first discharge opening through which the stage is exposed to an internal space of the inner case; an outer case including: a side wall portion surrounding the inner case, a protrusion portion protruded from the side wall portion toward the inner case, and a second discharge opening in fluid connection with the first discharge opening; a suction pump connected to the second discharge opening; an air injector in fluid connection with the internal space; and an intake opening in fluid connection with the first and second discharge openings. A width of the intake opening as a distance between the distal end of the inner case and the distal end of the protrusion portion is smaller than a width of the first discharge opening.

公开(公告)号：US11565351B2

公开(公告)日：2023-01-31

申请号：US16375582

申请日：2019-04-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Toshinaru Suzuki ,  Dokyun Kwon ,  Jaebum Pahk ,  Jinwon Baek ,  Jeongho Yi ,  Jinpyung Lee ,  Kyongho Hong

IPC: B23K26/36 ,  B23K26/38 ,  H01L21/687 ,  B23K26/70

Abstract: A substrate processing apparatus includes the following: a support frame, first stage, a suction part, and a plurality of island-type second stages. The support frame is disposed on the first stage. The height of the support frame is lower than the height of the first stage. A plurality of island-type second stages are disposed on the support frame on the same plane as the first stage. The suction part is disposed on the support frame.

公开(公告)号：US09960041B2

公开(公告)日：2018-05-01

申请号：US14973120

申请日：2015-12-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaebum Pahk

IPC: H01L21/22 ,  C23C14/22 ,  C23C14/24

CPC classification number: H01L21/22 ,  C23C14/228 ,  C23C14/243

Abstract: A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.

公开(公告)号：US20210057498A1

公开(公告)日：2021-02-25

申请号：US16811365

申请日：2020-03-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jaebum Pahk ,  Donggyu Shin ,  Bongjin Baek

IPC: H01L27/32 ,  H01L51/52 ,  H01L51/56

Abstract: A display device includes: a substrate including a display area and a non-display area; a plurality of display elements disposed in the display area and including a pixel electrode, a common layer, a light-emitting layer, and an opposite electrode; and a pixel defining layer having an opening exposing a central portion of the pixel electrode, wherein the common layer comprises a first region disposed between a first light-emitting layer disposed in a first display element and a second light-emitting layer disposed in a second display element adjacent to the first display element among the plurality of display elements, and wherein the first region has protrusions spaced apart from one another.

公开(公告)号：US10431461B2

公开(公告)日：2019-10-01

申请号：US15950344

申请日：2018-04-11

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaebum Pahk

IPC: H01L21/22 ,  C23C14/22 ,  C23C14/24

Abstract: A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.