公开(公告)号：US20200206765A1

公开(公告)日：2020-07-02

申请号：US16817325

申请日：2020-03-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su Cheol GONG ,  Min Goo KANG ,  Taek Kyo KANG ,  Jung Woo KO ,  Min Ju KIM ,  Young Eun RYU ,  Jae Suk MOON ,  Soo Hyun MIN

IPC: B05B12/20 ,  B23K31/02 ,  B05C21/00 ,  C23C14/04

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.

公开(公告)号：US20230220535A1

公开(公告)日：2023-07-13

申请号：US18122644

申请日：2023-03-16

Applicant: Samsung Display Co, Ltd.

Inventor： Jae Suk MOON ,  Young Eun RYU ,  Soo Hyun MIN ,  Taek Kyo KANG ,  Min Ju KIM

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  H10K71/00 ,  C23C14/24 ,  C23C14/04 ,  H10K71/166

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

公开(公告)号：US20240060172A1

公开(公告)日：2024-02-22

申请号：US18203702

申请日：2023-05-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jun Hyeuk KO ,  Jae Suk MOON ,  Min Goo KANG ,  Eui Gyu KIM ,  Min Chul SONG ,  Suk Ha RYU ,  Young Sun CHO

IPC: C23C14/50 ,  C23C14/04 ,  C23C14/24

CPC classification number: C23C14/50 ,  C23C14/042 ,  C23C14/24

Abstract: A deposition apparatus for depositing a deposition material on a base substrate disposed on a mask, includes: a mask assembly including a mask frame which defines an opening therein and surrounds the opening, and the mask disposed on the mask frame; an electrostatic chuck disposed on the base substrate; and a plate disposed on the electrostatic chuck. The electrostatic chuck includes a plurality of magnetic bodies, and a magnetic property of at least one magnetic body among the plurality of magnetic bodies is different from a magnetic property of remaining magnetic bodies except for the at least one magnetic body among the plurality of magnetic bodies.

公开(公告)号：US20180071764A1

公开(公告)日：2018-03-15

申请号：US15651034

申请日：2017-07-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su Cheol GONG ,  Min Goo KANG ,  Taek Kyo KANG ,  Jung Woo KO ,  Min Ju KIM ,  Young Eun RYU ,  Jae Suk MOON ,  Soo Hyun MIN

IPC: B05B15/04 ,  B05C21/00 ,  B23K31/02

CPC classification number: B05B12/20 ,  B05C21/005 ,  B23K31/02 ,  B23K2103/04 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.

公开(公告)号：US20250054668A1

公开(公告)日：2025-02-13

申请号：US18666208

申请日：2024-05-16

Applicant: Samsung Display Co., LTD.

Inventor： Jung Hyun AHN ,  Jae Suk MOON ,  Seung Jin LEE

IPC: H01F7/02 ,  B05D1/04 ,  B05D1/32

Abstract: A magnet assembly includes a yoke plate disposed on a plane, and a magnetic field generator which is disposed on the yoke plate and includes magnet parts including magnet units, magnetic bodies, and non-magnetic bodies. The magnetic bodies overlap the magnet parts in a plan view. The non-magnetic bodies overlap an area between the magnet units in a plan view. The magnet assembly operates in one of a first mode and a second mode. The magnetic field generator generates a magnetic field below the magnetic bodies and the non-magnetic bodies in the first mode and does not substantially generate the magnetic field below the magnetic bodies and the non-magnetic bodies in the second mode.

公开(公告)号：US20180087143A1

公开(公告)日：2018-03-29

申请号：US15663318

申请日：2017-07-28

Applicant: Samsung Display Co., Ltd.

Inventor： Jae Suk MOON ,  Young Eun RYU ,  Soo Hyun MIN ,  Taek Kyo KANG ,  Min Ju KIM

IPC: C23C14/04 ,  H01L51/00 ,  H01L51/56

CPC classification number: C23C14/042 ,  C23C14/24 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.