DEPOSITION APPARATUS
    1.
    发明公开

    公开(公告)号:US20240133021A1

    公开(公告)日:2024-04-25

    申请号:US18489608

    申请日:2023-10-17

    CPC classification number: C23C14/243 H10K71/135

    Abstract: A deposition apparatus includes: a vaporization portion to vaporize a first material, a second material, and a third material different from each other; and a first nozzle portion connected adjacent to the vaporization portion. The first nozzle portion includes: a first nozzle hole to discharge the first material; a second nozzle hole adjacent to the first nozzle hole and to discharge the second material; and a third nozzle hole adjacent to the first nozzle hole and the second nozzle hole and to discharge the third material.

    DEPOSITION APPARATUS
    2.
    发明公开

    公开(公告)号:US20240229223A9

    公开(公告)日:2024-07-11

    申请号:US18489608

    申请日:2023-10-18

    CPC classification number: C23C14/243 H10K71/135

    Abstract: A deposition apparatus includes: a vaporization portion to vaporize a first material, a second material, and a third material different from each other; and a first nozzle portion connected adjacent to the vaporization portion. The first nozzle portion includes: a first nozzle hole to discharge the first material; a second nozzle hole adjacent to the first nozzle hole and to discharge the second material; and a third nozzle hole adjacent to the first nozzle hole and the second nozzle hole and to discharge the third material.

    EVAPORATION DEVICE
    4.
    发明申请

    公开(公告)号:US20250084524A1

    公开(公告)日:2025-03-13

    申请号:US18748652

    申请日:2024-06-20

    Abstract: An evaporation device includes a first deposition source, a second deposition source in a first direction together with the first deposition source, a body part spaced apart from the first and second deposition sources in a second direction intersecting the first direction and including a first portion and a second portion in the second direction, a nozzle body part on the body part, a first pipe connected to a side surface of the first deposition source facing the body part and the nozzle body part and a lower end of the first portion, a second pipe connected to a side surface of the second deposition source facing the body part and the nozzle body part and a lower end of the second portion, a first nozzle protruding upward from the nozzle body part, and a second nozzle protruding upward from the nozzle body part.

Patent Agency Ranking