公开(公告)号：US20250084524A1

公开(公告)日：2025-03-13

申请号：US18748652

申请日：2024-06-20

Applicant: Samsung Display Co., Ltd.

Inventor： INAE HAN ,  JONGBUN HAN ,  HYUNJAE KIM ,  HUNDONG KIM

IPC: C23C14/24 ,  H10K71/16

Abstract: An evaporation device includes a first deposition source, a second deposition source in a first direction together with the first deposition source, a body part spaced apart from the first and second deposition sources in a second direction intersecting the first direction and including a first portion and a second portion in the second direction, a nozzle body part on the body part, a first pipe connected to a side surface of the first deposition source facing the body part and the nozzle body part and a lower end of the first portion, a second pipe connected to a side surface of the second deposition source facing the body part and the nozzle body part and a lower end of the second portion, a first nozzle protruding upward from the nozzle body part, and a second nozzle protruding upward from the nozzle body part.

公开(公告)号：US20240200186A1

公开(公告)日：2024-06-20

申请号：US18496919

申请日：2023-10-30

Applicant: Samsung Display Co., LTD.

Inventor： HYUNJAE KIM ,  HYUNGYU KANG ,  JONGWOOK CHAE ,  JONGBUN HAN ,  DAEYONG KIM ,  Gan Young PARK

IPC: C23C16/04

CPC classification number: C23C16/042

Abstract: An embodiment provides a deposition apparatus including a chamber; and a deposition source disposed in the chamber and including a plurality of nozzles arranged in a first direction. Each of the plurality of nozzles includes at least one first nozzle including a first nozzle hole spraying a first deposition material and a second nozzle hole spraying a second deposition material, and the deposition source further includes at least one angle controlling structure surrounding the at least one first nozzle.