Abstract:
A mask substrate inspection system includes a measurement target module, a camera module, and a control module. The measurement target module includes a mask substrate and a surface light source supplying a light to the mask substrate. The camera module generates image information of the mask substrate using the light from the surface light source. The control module determines whether defects are present in the mask substrate using the image information, without damaging the mask substrate.
Abstract:
A data processing device includes a first reference value generator which generates a first reference value corresponding to a ratio of a chromatic color using image signals or first image signals obtained by gamma-compensating the image signals, a white generator which generates a white image signal and second image signals using the first image signals and a second reference value corresponding to an amount of a white data in use, a third reference value generator which generates a third reference value using a first color coordinate corresponding to a color coordinate of the second image signals, a second color coordinate corresponding to a color coordinate of the white image signal, the first reference value, and the second reference value, and a gamut mapper which maps the second image signals to a color coordinate corresponding to the third reference value to generate third image signals.