公开(公告)号：US11460247B2

公开(公告)日：2022-10-04

申请号：US16795109

申请日：2020-02-19

Applicant: Samsung Display Co., Ltd.

Inventor： Jung Wook Lee ,  Yeon Ju Kwon ,  Do Hyun Kim ,  Jung Soo Kim ,  Ga Hee Park ,  Ha Jun Song ,  Do Yoon Lee ,  Hun Hyeon Im

IPC: F26B5/04 ,  G03F7/16 ,  F26B3/20

Abstract: A vacuum dryer including a chamber configured to provide an interior space, support pins in the interior space proximate to a bottom of the chamber, a power supply configured to supply power to the support pins, and a pump coupled to the interior space in the chamber.