公开(公告)号：US20130115366A1

公开(公告)日：2013-05-09

申请号：US13726504

申请日：2012-12-24

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Chang-Mo PARK ,  Jin-Koo CHUNG ,  Joo-Hyeon LEE

IPC: B05D3/04 ,  C23C14/54

CPC classification number: C23C14/547 ,  C23C14/24

Abstract: Apparatus and a method for forming a thin film including a vacuum chamber, a substrate holder located on the inner upper side of the vacuum chamber to secure a substrate, an evaporation source located on the inner lower side of the vacuum chamber to evaporate a deposition material, an evaporation source shutter substantially confining the deposition material evaporated to the evaporation source, a sensor located within the vacuum chamber to detect the thickness of the deposition material deposited on itself, and a calculation portion calculating the thickness of the deposition material deposited on the evaporation source shutter using data detected by the sensor.

Abstract translation: 用于形成薄膜的装置和方法，所述薄膜包括真空室，位于所述真空室的内上侧以固定基板的基板保持器，位于所述真空室的内下侧以蒸发沉积材料的蒸发源 ，蒸发源快门，其基本上限制蒸发到蒸发源的沉积材料，位于真空室内的传感器，以检测沉积在其上的沉积材料的厚度，以及计算部分，其计算沉积在蒸发上的沉积材料的厚度 源快门使用由传感器检测到的数据。

公开(公告)号：US20150050758A1

公开(公告)日：2015-02-19

申请号：US14168859

申请日：2014-01-30

Applicant: Samsung Display Co., Ltd.

Inventor： Yo-Sub KO ,  Beung-Hwa JEONG ,  Hong-Ro LEE ,  Chang-Mo PARK ,  Sung-Hoon Hong

IPC: H01L51/56 ,  H01L27/32

CPC classification number: H01L27/3223 ,  H01L2227/326

Abstract: A method for manufacturing a flexible display device includes forming a separation layer on a carrier substrate, laminating a flexible substrate having an area that is larger than an area of the separation layer, to the separation layer; forming a dummy pattern on and along an edge of the flexible substrate; exposing a portion of the separation layer by removing a portion of the flexible substrate at a side of the flexible substrate; and separating the separation layer and the flexible substrate from each other.

Abstract translation: 一种制造柔性显示装置的方法包括在载体基板上形成分离层，将具有大于分离层的面积的面积的柔性基板层压到分离层; 在所述柔性基板的边缘上并沿着所述柔性基板的边缘形成虚设图案; 通过在柔性基板的一侧移除柔性基板的一部分来暴露分离层的一部分; 以及将分离层和柔性基板彼此分离。

公开(公告)号：US20140339562A1

公开(公告)日：2014-11-20

申请号：US14447325

申请日：2014-07-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Mu-Gyeom KIM ,  Chang-Mo PARK

IPC: H01L29/786

CPC classification number: H01L29/7869 ,  G06F3/0412 ,  G06F3/044 ,  G06F2203/04111 ,  H01L29/41733 ,  H01L29/42384

Abstract: According to an aspect of the present invention, there is provided a thin-film transistor (TFT) sensor, including a bottom gate electrode on a substrate, an insulation layer on the bottom gate electrode, an active layer in a donut shape on the insulation layer, the active layer including a channel through which a current generated by a charged body flows, an etch stop layer on the active layer, the etch stop layer including a first contact hole and a second contact hole, and a source electrode and a drain electrode burying the first and second contact holes, the source and drain electrodes being disposed on the etch stop layer so as to face each other.

Abstract translation: 根据本发明的一个方面，提供了一种薄膜晶体管（TFT）传感器，其包括在基底上的底栅电极，底栅电极上的绝缘层，绝缘体上的环形形式的活性层 所述有源层包括通过电荷产生的电流流过的通道，所述有源层上的蚀刻停止层，所述蚀刻停止层包括第一接触孔和第二接触孔，以及源电极和漏极 电极埋置第一和第二接触孔，源极和漏极设置在蚀刻停止层上以彼此面对。