公开(公告)号：US20250043409A1

公开(公告)日：2025-02-06

申请号：US18654289

申请日：2024-05-03

Applicant: Samsung Display Co., Ltd.

Inventor： DONGKIUN SEO ,  MIN-GYU SEO ,  SANGMIN JUNG ,  GANYOUNG PARK ,  CHULHWAN AN ,  HWAPYEONG JEONG

IPC: C23C14/24 ,  C23C14/04 ,  H10K59/12 ,  H10K71/16

Abstract: A deposition apparatus includes a mask frame, a mask disposed on the mask frame, a crucible disposed below the mask frame, and a nozzle coupled to the crucible, and disposed between the crucible and the mask frame. The nozzle includes a body part including a coupling opening, and a spray part disposed in the coupling opening and including a hole overlapping the coupling opening. A thermal expansion coefficient of the spray part is greater than a thermal expansion coefficient of the body part.

公开(公告)号：US20240141475A1

公开(公告)日：2024-05-02

申请号：US18230860

申请日：2023-08-07

Applicant: Samsung Display Co., LTD.

Inventor： JAEWAN SEOL ,  MIN-GYU SEO ,  INTAEK YOON ,  JONGHYUN CHOI

IPC: C23C14/26 ,  C23C14/04

CPC classification number: C23C14/26 ,  C23C14/042

Abstract: A deposition apparatus includes a chamber providing an inner space and a deposition source including an accommodation module accommodating a deposition material and a heater module providing heat to the deposition material. The deposition source is accommodated in the inner space to provide the deposition material. The heater module includes a first heater cover including a surface facing the accommodation module, including an insulating material, and provided with a first through hole, a second heater cover including an insulating material and provided with a second through hole, a heater disposed between the first and second heater covers, a fixing frame coupled with the second heater cover to fix the second heater cover and provided with a fastening hole, a coupling member inserted into the first and second through holes and the fastening hole, and a shielding cover covering an end of the coupling member and including an insulating material.