DEVICE FOR DETECTING DEFECT AND METHOD OF DRIVING THE SAME

    公开(公告)号:US20190147577A1

    公开(公告)日:2019-05-16

    申请号:US16136094

    申请日:2018-09-19

    Abstract: In a device for detecting a defect, the device includes: an image pickup unit including pixels, the image pickup unit generating a substrate image by picking up an image of a substrate having patterns formed on a top surface thereof; and a controller for detecting a defect located on the substrate, based on the substrate image, wherein the substrate image includes pattern images corresponding to the patterns, wherein each of the pattern images includes pixel values, wherein the controller detects the defect by comparing weights of pixel values for each of the pattern images.

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