公开(公告)号：US20140183498A1

公开(公告)日：2014-07-03

申请号：US14136951

申请日：2013-12-20

Applicant: Saint-Gobain Performance Plastics Corporation

Inventor： Anirban Dhar ,  Alessandro Giassi

IPC: H01L51/52 ,  H01L51/44 ,  B32B27/06

CPC classification number: H01L51/5253 ,  C23C16/345 ,  C23C16/505 ,  H01L51/448 ,  Y02E10/549 ,  Y10T428/269

Abstract: An article comprising a polymeric substrate and at least one inorganic barrier layer, wherein the inorganic barrier layer has a stress not greater than about 400 MPa and a density of at least about 1.5 g/cm3. The article is preferably an optical device, such as an organic light emitting diode (OLED) or a photovoltaic (PV) module, wherein a silicon nitride barrier layer has been directly deposited on a flexible polymeric substrate via plasma enhanced chemical vapor deposition (PECVD).

Abstract translation: 一种包含聚合物基材和至少一种无机阻挡层的制品，其中所述无机阻挡层具有不大于约400MPa的应力和至少约1.5g / cm 3的密度。 该物品优选是诸如有机发光二极管（OLED）或光伏（PV）模块的光学器件，其中通过等离子体增强化学气相沉积（PECVD）将氮化硅阻挡层直接沉积在柔性聚合物基底上， 。