公开(公告)号：US10895740B2

公开(公告)日：2021-01-19

申请号：US16007951

申请日：2018-06-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  H01S5/022 ,  G02B6/35 ,  G03B21/28 ,  H04N9/31 ,  G02B6/42

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US10018835B2

公开(公告)日：2018-07-10

申请号：US15280704

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  H04N9/31 ,  G03B21/28

CPC classification number: G02B26/103 ,  G02B6/0006 ,  G02B6/322 ,  G02B6/3502 ,  G02B6/3506 ,  G02B6/3508 ,  G02B6/4202 ,  G02B6/4225 ,  G02B6/4226 ,  G03B21/28 ,  H01S5/02284 ,  H04N9/3129

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US09256027B2

公开(公告)日：2016-02-09

申请号：US14145807

申请日：2013-12-31

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alberto Pagani ,  Alessandro Motta ,  Sara Loi ,  Guido Chiaretti

IPC: G02B6/12 ,  G02B6/43 ,  H01L31/0232 ,  H01L31/103 ,  H01L31/12 ,  G02B6/42

CPC classification number: G02B6/12002 ,  G02B6/12004 ,  G02B6/42 ,  G02B6/4214 ,  G02B6/43 ,  H01L31/02327 ,  H01L31/103 ,  H01L31/125

Abstract: An integrated electronic device, delimited by a first surface and by a second surface and including: a body made of semiconductor material, formed inside which is at least one optoelectronic component chosen between a detector and an emitter; and an optical path which is at least in part of a guided type and extends between the first surface and the second surface, the optical path traversing the body. The optoelectronic component is optically coupled, through the optical path, to a first portion of free space and a second portion of free space, which are arranged, respectively, above and underneath the first and second surfaces.

公开(公告)号：US11251580B2

公开(公告)日：2022-02-15

申请号：US16669438

申请日：2019-10-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Flavio Francesco Villa ,  Guido Chiaretti ,  Gabriele Barlocchi

IPC: H01S5/026

Abstract: An integrated optical device, including: a semiconductor body delimited by a top surface; and at least one buried cavity, which extends in the semiconductor body, at a distance from the top surface, so as to delimit at the bottom a front semiconductor region, which functions as an optical guide.

公开(公告)号：US10557753B2

公开(公告)日：2020-02-11

申请号：US15938605

申请日：2018-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： Sara Loi ,  Alberto Pagani ,  Guido Chiaretti

IPC: G01N21/25 ,  G01J3/02 ,  G01J3/28 ,  G01J3/14 ,  G01J3/12

Abstract: A spectrometer includes a substrate; a plurality of light detectors in the substrate; and a plurality of light filters over the plurality of light detectors, each of the plurality of light filters transmitting a different wavelength or reflecting a different wavelength, each of the light filters aligned with a corresponding one of the plurality of light detectors.

公开(公告)号：US20190301930A1

公开(公告)日：2019-10-03

申请号：US15938605

申请日：2018-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： Sara Loi ,  Alberto Pagani ,  Guido Chiaretti

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/14

Abstract: A spectrometer includes a substrate; a plurality of light detectors in the substrate; and a plurality of light filters over the plurality of light detectors, each of the plurality of light filters transmitting a different wavelength or reflecting a different wavelength, each of the light filters aligned with a corresponding one of the plurality of light detectors.

公开(公告)号：US20170269355A1

公开(公告)日：2017-09-21

申请号：US15280704

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  G03B21/28 ,  H04N9/31

CPC classification number: G02B26/103 ,  G02B6/0006 ,  G02B6/322 ,  G02B6/3502 ,  G02B6/3506 ,  G02B6/3508 ,  G02B6/4202 ,  G02B6/4225 ,  G02B6/4226 ,  G03B21/28 ,  H01S5/02284 ,  H04N9/3129

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.