Invention Grant
- Patent Title: Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method
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Application No.: US16007951Application Date: 2018-06-13
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Publication No.: US10895740B2Publication Date: 2021-01-19
- Inventor: Guido Chiaretti , Fabio Luigi Grilli , Roberto Carminati , Bruno Murari , Lorenzo Sarchi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102016000028779 20160318
- Main IPC: G02B26/10
- IPC: G02B26/10 ; H01S5/022 ; G02B6/35 ; G03B21/28 ; H04N9/31 ; G02B6/42

Abstract:
A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.
Public/Granted literature
- US20180292645A1 PROJECTIVE MEMS DEVICE FOR A PICOPROJECTOR OF THE FLYING SPOT TYPE AND RELATED MANUFACTURING METHOD Public/Granted day:2018-10-11
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