Optical unit, measurement system, and measurement method

    公开(公告)号:US10932681B2

    公开(公告)日:2021-03-02

    申请号:US15544069

    申请日:2015-12-03

    Abstract: Provided is an optical unit that radiates a coherent light such that the coherent light is incident in a target region of speckle image capturing in accordance with a pattern that includes a bright region and a dark region located uniformly in at least one direction in the target region. Provided is a measurement system including: an optical unit that radiates a coherent light such that the coherent light is incident in a target region in accordance with a pattern that includes a bright region and a dark region located uniformly in at least one direction in the target region; a light reception unit that receives a reflected light of the coherent light in the target region; and an imaging unit that captures an image of a speckle included in the reflected light.

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