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公开(公告)号:US20240339135A1
公开(公告)日:2024-10-10
申请号:US18365726
申请日:2023-08-04
申请人: SK hynix Inc.
发明人: Yong Jin JEONG , Sang Gu YEO
CPC分类号: G11C5/063 , H10B63/84 , H10N70/021 , H10N70/841
摘要: A semiconductor device may include a first contact plug, a word line electrically connected to the first contact plug and extending in a first direction, a second contact plug, a bit line extending in a second direction that intersects the first direction, and a memory cell disposed between the word line and the bit line and including a variable resistance layer. The bit line may include a first protruding part that protrudes into the memory cell, a second protruding part that is connected to the second contact plug, and a connection part that connects the first protruding part and the second protruding part and that extends in the second direction.
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公开(公告)号:US20240334714A1
公开(公告)日:2024-10-03
申请号:US18459191
申请日:2023-08-31
申请人: SK hynix Inc.
发明人: Sang Gu YEO , Yong Jin JEONG
IPC分类号: H10B63/00 , H01L21/762
CPC分类号: H10B63/845 , H01L21/76224
摘要: A manufacturing method may include forming an opening within a stack, forming a variable resistance layer within the opening and on the stack, forming a conductive layer on the variable resistance layer, forming a conductive pattern including a first part within the opening and a second part on the stack, by etching the conductive layer, forming a variable resistance pattern including a first part within the opening and a second part on the stack, by etching the variable resistance layer, and planarizing the conductive pattern and the variable resistance pattern until the stack is exposed.
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