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公开(公告)号：US20200071091A1
公开(公告)日：2020-03-05
申请号：US16678661
申请日：2019-11-08
发明人： Atsushi SUZUKI , Yasushi TANIYAMA
IPC分类号： B65G49/00 , H01L21/67 , H01L21/677 , H01L21/673
摘要： A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.
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公开(公告)号：US20180254209A1
公开(公告)日：2018-09-06
申请号：US15757560
申请日：2016-08-19
IPC分类号： H01L21/673
CPC分类号： H01L21/67389 , F16K15/028 , F16K15/147 , F16K31/1221 , H01L21/67393 , H01L21/67772 , H01L21/67775
摘要： There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.
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公开(公告)号：US20180229945A1
公开(公告)日：2018-08-16
申请号：US15750376
申请日：2016-07-12
发明人： Atsushi SUZUKI , Yasushi TANIYAMA
CPC分类号： B65G49/00 , H01L21/67201 , H01L21/67393 , H01L21/67772
摘要： A load port including: a base as part of a wall partitioning a transportation space from external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.
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公开(公告)号：US20200168495A1
公开(公告)日：2020-05-28
申请号：US16774758
申请日：2020-01-28
IPC分类号： H01L21/677 , H01L21/67 , H01L21/673
摘要： Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.
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公开(公告)号：US20180204753A1
公开(公告)日：2018-07-19
申请号：US15750379
申请日：2016-07-12
IPC分类号： H01L21/677 , H01L21/673 , H01L21/67
摘要： A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.
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