公开(公告)号：US3862419A

公开(公告)日：1975-01-21

申请号：US37341573

申请日：1973-06-25

Applicant: SIEMENS AG

Inventor： VENEKLASEN LEE

IPC: H01J37/063 ,  H01J37/04 ,  H01J37/073 ,  H01J37/141 ,  H01J37/21 ,  H01J37/26

CPC classification number: H01J37/04 ,  H01J37/073

Abstract: An electron-beam illuminating system for an electrical apparatus such as an electron microscope or the like includes a cathode for supplying the electrons making up the electron-beam. A first anode is disposed beyond the cathode and defines therewith a beam axis extending in beam direction. A positive bias voltage on the first anode determines the emission of the cathode. An acceleration anode is disposed beyond the first anode and defines an acceleration path for the electrons emitted by the cathode. An acceleration voltage is applied across the cathode and the acceleration anode. A further electrode is located between the first anode and the accelerating electrode and defines conjointly with the first anode a space therebetween along the beam axis. A voltage is applied to the further electrode which is linearly proportional to the acceleration voltage. An auxiliary lens generates a first image of the source in this space. An electric circuit supplies a voltage to the further electrode which is linearly proportional to the acceleration voltage.

Abstract translation: 用于诸如电子显微镜等的电气设备的电子束照明系统包括用于提供构成电子束的电子的阴极。 第一阳极设置在阴极之外，并且由此限定沿射束方向延伸的射束轴线。 第一阳极上的正偏置电压确定阴极的发射。 加速阳极设置在第一阳极之外并且限定由阴极发射的电子的加速路径。 在阴极和加速阳极之间施加加速电压。 另一个电极位于第一阳极和加速电极之间，并且与第一阳极一起沿着光束轴与其间形成一个空间。 电压被施加到与加速电压成线性比例的另一电极。 辅助透镜在该空间中产生源的第一图像。 电路向另外的电极提供与加速电压成线性比例的电压。