-
公开(公告)号：US12212299B2
公开(公告)日：2025-01-28
申请号：US17799446
申请日：2022-01-19
Inventor： Xueli Feng , Shaohua Xiang , Chong Wang , Weizhong Shan
Abstract: An electronic device and a method of forming the same are disclosed. An emitter resonator and a reception cap cavity are formed on and in a first wafer, and an emitter cap cavity and a reception resonator are formed in and on a second wafer. After bonding together the first and second wafers, an emitter filter is formed in an emission region, and a reception filter is formed in a receiving region. The method provided in the present invention not only can simplify the fabrication process of the device and improve its accuracy and stability, but also facilitates integration of the emitter and receives filters in a same chip, which results in a higher degree of integration of the device and a more compact package size thereof.
Search Results
1
records
(took 0.024 seconds)
