公开(公告)号：US20180272366A1

公开(公告)日：2018-09-27

申请号：US15935111

申请日：2018-03-26

申请人： SEMES CO., LTD.

发明人： SOON CHEON CHO ,  BONGKYU SHIN ,  HYUN JOONG KIM

IPC分类号： B05B5/025 ,  B05B17/04 ,  B05C5/02 ,  B05D1/04

CPC分类号： B05B5/025 ,  B05B5/001 ,  B05B5/081 ,  B05B5/082 ,  B05B5/087 ,  B05B7/22 ,  B05B17/04 ,  B05C5/0291 ,  B05D1/04 ,  B05D3/141 ,  B05D3/20

摘要： Disclosed are a coating apparatus and a coating method. The coating apparatus includes a chamber, a support located in an interior space of the chamber and configured to support a substrate which is to be coated, an ejection nozzle configured to eject a coating material toward the support, and an electric field forming unit configured to form an electric field in a movement path of the coating material to provide kinetic energy for the coating material.