公开(公告)号：US20240142389A1

公开(公告)日：2024-05-02

申请号：US18382046

申请日：2023-10-19

申请人： SEMES CO., LTD.

发明人： Jeong Hoon HAN ,  Oh Yeol KWON ,  Jun Hyun LIM ,  Dong Min PARK

IPC分类号： G01N21/95 ,  G01N21/88 ,  H01L21/66

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N21/8851 ,  H01L22/24 ,  G01N2201/061

摘要： A substrate inspection apparatus inspecting substrates using a vision system, which includes a camera module and an illumination module, and a substrate treatment system including the substrate inspection apparatus are provided. The substrate treatment system includes: a first substrate treatment apparatus; a second substrate treatment apparatus; a transfer unit transporting a container with a plurality of substrates accommodated therein from the first substrate treatment apparatus to the second substrate treatment apparatus; and a substrate inspection apparatus inspecting the substrates, wherein the substrate inspection apparatus includes an illumination module, which illuminates in a direction where the substrates are located, a camera module, which acquires images related to the substrates when the substrates are illuminated, and a control module, which inspects the substrates based on the images.