Abstract:
A laser interferometer includes a laser light source configured to emit first laser light; an optical modulator that includes a resonator element and is configured to generate second laser light including a modulation signal; a light receiving element configured to receive the second laser light and third laser light including a sample signal; and a calculation unit configured to calculate a displacement of an object to be measured from a light reception signal based on a reference signal, in which the calculation unit includes a preprocessing unit configured to execute a preprocessing of extracting a frequency modulation component from the light reception signal and output a preprocessing signal, a demodulation processing unit configured to mix the preprocessing signal with orthogonal signals to obtain a mixed signal and then execute a demodulation processing of extracting the sample signal from the mixed signal, and an orthogonal signal generation unit configured to generate the orthogonal signals based on a phase of the reference signal and an amplitude of the preprocessing signal.
Abstract:
A three-dimensional measuring device is a three-dimensional measuring device that performs three-dimensional measurement of an object using a laser beam. The three-dimensional measuring device includes a laser emitter disposed in a movable section of a robot and configured to irradiate a region including the object with the laser beam, a laser emission controller configured to control driving of the laser emitter, an image capturing device configured to image the object, on which the laser beam is irradiated, and acquire image data, and a point cloud generator configured to generate, based on the image data, three-dimensional point cloud of the region including the object. The laser emitter includes a laser beam source and a diffuser configured to diffuse the laser beam emitted from the laser beam source.
Abstract:
A laser interferometer that includes a light source configured to emit laser light, an optical divider configured to divide the laser light into a first optical path and a second optical path, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and being configured to modulate the laser light by using the oscillator, a photoreceptor configured to receive the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit configured to demodulate, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal derived from the optical modulator, wherein Iq/f≤1×10−7 is satisfied, where an amplitude value of the current applied to the oscillator that is oscillating is Iq [A] and an oscillation frequency of the oscillator is f [Hz].
Abstract:
An optical scanning apparatus includes a MEMS substrate, a substrate fixing section to which the MEMS substrate is fixed, and an environment detection sensor that detects an environment factor associated with the mirror. The environment detection sensor is disposed in a position where the environment detection sensor overlaps with or is adjacent to the substrate fixing section but does not overlap with the MEMS substrate in a plan view viewed in a direction perpendicular to a surface of the MEMS substrate.
Abstract:
An optical scanner includes: a movable portion that is provided with a light reflection portion and is swingable around a first axis; a frame body portion that is swingable around a second axis; a first shaft portion that connects the movable portion and the frame body portion; a fixed portion; a second shaft portion that connects the frame body portion and the fixed portion; a strain detection element that is disposed in the second shaft portion to detect deformation of the second shaft portion; a first signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on bending deformation of the second shaft portion; and a second signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on torsional deformation of the second shaft portion.
Abstract:
The image display apparatus includes a light attenuation section that reflects a portion of light emitted from a light source and a scanning section that scans the light reflected by the light attenuation section. The light attenuation section transmits a portion of light emitted from the light source. The light attenuation section has reflectance and transmittance and the reflectance is smaller than the transmittance. The image display apparatus further includes a light receiving element on which the light transmitted through the light attenuation section is incident. The image display apparatus also includes a control section that controls activation of the light source in accordance with detection results of the light receiving element.
Abstract:
A laser interferometer includes alight source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.
Abstract:
A laser interferometer includes: a laser light source configured to emit laser light; an optical modulator including a vibrator driven by a drive signal and configured to superimpose a modulation signal on the laser light using the vibrator; a photodetector configured to receive the laser light including a sample signal superimposed thereon due to reflection by an object and the laser light including the modulation signal, and output a light receiving signal; a calculation unit configured to perform a calculation on the light receiving signal based on a reference signal; and a signal generation unit configured to output the drive signal and the reference signal. The calculation unit includes a preprocessing unit configured to perform preprocessing for extracting a frequency modulation component from the light receiving signal based on the reference signal, and output a preprocessing signal including the frequency modulation component, a demodulation processing unit configured to demodulate the sample signal from the preprocessing signal based on the reference signal, and a correction processing unit configured to output a correction signal based on an output signal output in response to driving of the vibrator. The signal generation unit corrects the drive signal and the reference signal based on the correction signal.
Abstract:
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.
Abstract:
An optical attenuator, when damaged, loses not only a light attenuation function but also part of an optical path shift function utilizing a refractive effect, and thus an optical path shift function in a normal state is lost. Thus, it is possible to diverts an optical path of modulate light, which is a laser beam, from a direction toward a mirror surface, that is, a direction toward the eye of an observer.