公开(公告)号：US11662022B2

公开(公告)日：2023-05-30

申请号：US16998147

申请日：2020-08-20

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: F16J15/00 ,  F16J15/3248 ,  F16J15/3268

CPC classification number: F16J15/002 ,  F16J15/3248 ,  F16J15/3268 ,  F16J15/006

Abstract: Provided is a sealing apparatus capable of linear and rotational motion including a housing; a hollow first shaft penetrating and coupled to the housing; a first sealing member provided between the housing and the first shaft to seal therebetween; a second shaft of which at least a part is inserted into the first shaft; a second sealing member provided between the first shaft and the second shaft to seal therebetween; and a third sealing member provided on either an inner circumferential surface of the first shaft or an outer circumferential surface of the second shaft.

公开(公告)号：US11764102B2

公开(公告)日：2023-09-19

申请号：US17126463

申请日：2020-12-18

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: H01L21/687 ,  C23C14/56 ,  C23C14/50 ,  C23C16/44 ,  C23C16/458

CPC classification number: H01L21/68792 ,  C23C14/505 ,  C23C14/566 ,  C23C16/4408 ,  C23C16/4409 ,  C23C16/4584

Abstract: Provided is a rotating shaft sealing device. The rotating shaft sealing device mounted in a semiconductor substrate processing apparatus that processes a semiconductor substrate while rotating a semiconductor loading unit accommodating the semiconductor substrate, includes: a housing that is hollow and mounted in the semiconductor substrate processing apparatus; a rotating shaft accommodated in the housing and connected to the semiconductor loading unit to transfer a rotational force to the semiconductor loading unit; a bearing rotatably supporting the rotating shaft in the housing; a sealing unit including a plurality of seals arranged in the housing to tightly seal a gap between the housing and the rotating shaft; and a power transfer unit mounted at an end of the rotating shaft to transfer a rotational force to the rotating shaft.

公开(公告)号：US20170299061A1

公开(公告)日：2017-10-19

申请号：US15638116

申请日：2017-06-29

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: F16J15/3232 ,  F16J15/3268 ,  F16J15/16

Abstract: A sealing device for a drive shaft is disclosed and described. The sealing device for a drive shaft comprises a housing disposed to surround the drive shaft between the inner space and the outer space, a plurality of sealing members axially separated from each other between the housing and the drive shaft to seal between the housing and the drive shaft, fixing ring members interposed between the plurality of sealing members to maintain the separation distance between the sealing members, and a fixing member secured to the housing to apply an axial pressure to the plurality of sealing members and fixing ring members, wherein a concave-convex section is formed on at least one of the close surfaces of the fixing ring member and the sealing member, which face each other.

公开(公告)号：US10794492B2

公开(公告)日：2020-10-06

申请号：US15638116

申请日：2017-06-29

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: F16J15/3268 ,  F16J15/16 ,  F16J15/00 ,  F16J15/3228 ,  B63H23/32

Abstract: A sealing device for a drive shaft is disclosed and described. The sealing device for a drive shaft comprises a housing disposed to surround the drive shaft between the inner space and the outer space, a plurality of sealing members axially separated from each other between the housing and the drive shaft to seal between the housing and the drive shaft, fixing ring members interposed between the plurality of sealing members to maintain the separation distance between the sealing members, and a fixing member secured to the housing to apply an axial pressure to the plurality of sealing members and fixing ring members, wherein a concave-convex section is formed on at least one of the close surfaces of the fixing ring member and the sealing member, which face each other.

公开(公告)号：US10024753B2

公开(公告)日：2018-07-17

申请号：US15128863

申请日：2014-12-26

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: F16J3/00 ,  G01M3/28 ,  F16J15/00 ,  F16J15/322 ,  G01M3/38

Abstract: One embodiment of the present invention relates to a sealing system having a leakage sensing function. A leakage sensing unit is arranged in a sealed space which is formed between sealing members of a sealing device body so as to sense, in real time, whether the sealing members are leaking, wherein a sensing value of the leakage sensing unit can be transmitted to the outside by using a communication unit.

公开(公告)号：US11761518B2

公开(公告)日：2023-09-19

申请号：US16940908

申请日：2020-07-28

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: F16H25/12 ,  C23C16/455 ,  C23C16/458 ,  F16L27/12

CPC classification number: F16H25/12 ,  C23C16/4584 ,  C23C16/45544 ,  F16L27/125

Abstract: Provided is a linear movable rotary union including a driving shaft comprising a plurality of fluid supply paths; a hollow middle housing surrounding an outside of the driving shaft and comprising a plurality of first through holes in a sidewall; a plurality of first sealing members provided between the middle housing and the driving shaft to prevent leakage of a fluid; a hollow outer housing surrounding an outside of the middle housing and comprising a plurality of second through holes in a sidewall; and a plurality of second sealing members provided between the middle housing and the outer housing to prevent leakage of the fluid, and wherein the driving shaft is installed to be capable of rotational motion in the middle housing, and the middle housing is installed to be capable of reciprocating motion in an axial direction in the outer housing.

公开(公告)号：US20210398844A1

公开(公告)日：2021-12-23

申请号：US17126463

申请日：2020-12-18

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: H01L21/687 ,  C23C14/56 ,  C23C14/50 ,  C23C16/44 ,  C23C16/458

Abstract: Provided is a rotating shaft sealing device. The rotating shaft sealing device mounted in a semiconductor substrate processing apparatus that processes a semiconductor substrate while rotating a semiconductor loading unit accommodating the semiconductor substrate, includes: a housing that is hollow and mounted in the semiconductor substrate processing apparatus; a rotating shaft accommodated in the housing and connected to the semiconductor loading unit to transfer a rotational force to the semiconductor loading unit; a bearing rotatably supporting the rotating shaft in the housing; a sealing unit including a plurality of seals arranged in the housing to tightly seal a gap between the housing and the rotating shaft; and a power transfer unit mounted at an end of the rotating shaft to transfer a rotational force to the rotating shaft.

公开(公告)号：US20170108399A1

公开(公告)日：2017-04-20

申请号：US15128863

申请日：2014-12-26

Applicant: SEALINK CORP.

Inventor： Hee Jang Rhee

IPC: G01M3/28 ,  F16J15/322 ,  G01M3/38 ,  F16J15/00

CPC classification number: G01M3/2869 ,  F16J15/002 ,  F16J15/004 ,  F16J15/322 ,  G01M3/16 ,  G01M3/38 ,  G01M13/005

Abstract: One embodiment of the present invention relates to a sealing system having a leakage sensing function. A leakage sensing unit is arranged in a sealed space which is formed between sealing members of a sealing device body so as to sense, in real time, whether the sealing members are leaking, wherein a sensing value of the leakage sensing unit can be transmitted to the outside by using a communication unit.