公开(公告)号：US10450266B2

公开(公告)日：2019-10-22

申请号：US15519308

申请日：2015-10-13

申请人： SAN-APRO LIMITED

发明人： Masaaki Oka ,  Yuji Nakamura

IPC分类号： C07C309/65 ,  C07C309/64 ,  C09K3/00 ,  G03F7/004 ,  G03F7/038 ,  C07C309/73 ,  C07D311/12 ,  C08G59/68

摘要： Provided are: a non-ionic photoacid generator containing a sulfonate compound having a high photosensitivity to i lines, exhibiting excellent heat-resistance stability, and exhibiting excellent solubility in a hydrophobic material; and a resin composition for photolithography containing the same. The present invention is a sulfonate compound characterized by being represented by general formula (1).[In formula (1), R1 represents an aryl group having 6 to 18 carbon atoms or a heterocyclic hydrocarbon group having 4 to 20 carbon atoms. R2 represents a hydrogen atom, an alkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, or an aryl group having 6 to 18 carbon atoms. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (in which some or all hydrogen atoms may be substituted with fluorine).]

公开(公告)号：US20170233336A1

公开(公告)日：2017-08-17

申请号：US15519308

申请日：2015-10-13

申请人： SAN-APRO LIMITED

发明人： Masaaki Oka ,  Yuji Nakamura

IPC分类号： C07C309/65 ,  G03F7/004 ,  C07D311/12 ,  C07C309/73

CPC分类号： C07C309/65 ,  C07C309/64 ,  C07C309/73 ,  C07D311/12 ,  C08G59/68 ,  C09K3/00 ,  G03F7/004 ,  G03F7/0045 ,  G03F7/038

摘要： Provided are: a non-ionic photoacid generator containing a sulfonate compound having a high photosensitivity to i lines, exhibiting excellent heat-resistance stability, and exhibiting excellent solubility in a hydrophobic material; and a resin composition for photolithography containing the same. The present invention is a sulfonate compound characterized by being represented by general formula (1).[In formula (1), R1 represents an aryl group having 6 to 18 carbon atoms or a heterocyclic hydrocarbon group having 4 to 20 carbon atoms. R2 represents a hydrogen atom, an alkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, or an aryl group having 6 to 18 carbon atoms. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (in which some or all hydrogen atoms may be substituted with fluorine).]