公开(公告)号：US20190323973A1

公开(公告)日：2019-10-24

申请号：US16242088

申请日：2019-01-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myung Ho JUNG ,  Young Su RYU ,  Sung Chai KIM ,  Jong Su KIM ,  Won Guk SEO ,  Chang Hoon CHOI ,  Jeong Su HA

IPC: G01N21/956 ,  G06T7/00 ,  G01N21/95 ,  G06T7/11 ,  H01L21/67 ,  H01L21/677

Abstract: An inspection apparatus for a semiconductor process and a semiconductor process device, the inspection apparatus including a transferer configured to transfer a process object between a plurality of chambers; at least one line camera installed above the transferer, the at least one line camera being configured to generate an original image by capturing an image of the process object transferred by the transferer; and a controller configured to receive the original image and to perform an inspection of the process object by correcting distortion of the original image due to a change in transfer speed of the transferer.