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公开(公告)号:US20180130713A1
公开(公告)日:2018-05-10
申请号:US15583167
申请日:2017-05-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: MIRCO CANTORO , YUN-IL LEE , HYUNG-SUK LEE , YEON-CHEOL HEO , BYOUNG-GI KIM , CHANG-MIN YOE , SEUNG-CHAN YUN , DONG-HUN LEE
IPC: H01L21/8234 , H01L29/24 , H01L29/161 , H01L29/267 , H01L27/088
Abstract: A semiconductor device includes a first semiconductor pattern doped with first impurities on a substrate, a first channel pattern on the first semiconductor pattern, second semiconductor patterns doped with second impurities contacting upper edge surfaces, respectively, of the first channel pattern, and a first gate structure surrounding at least a portion of a sidewall of the first channel pattern.