公开(公告)号：US09429525B2

公开(公告)日：2016-08-30

申请号：US14791607

申请日：2015-07-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myoung-Ki Ahn ,  Jin-Woo Ahn ,  Young-Gwon Kim ,  Tae-Jun Ahn ,  Tae-Yong Jo ,  Young Heo

IPC: G01J4/00 ,  G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/062 ,  G01N2201/0683

Abstract: An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Abstract translation: 用于表面检查的光学模块包括：第一光源单元，其利用由第一光源产生的第一光和改变第一光的路径的第一分束器照射基板;第二光源单元，其用第二光源单元照亮基板; 在第一方向上偏振的光;偏振改变单元，其以与第一方向垂直的第二方向偏振的第三光照亮基板;以及检测单元，其检测作为从第一方向反射的第一光的乘积的第四光 基板，作为从基板散射的第二光的乘积的第五光和作为从基板散射的第三光的乘积的第六光。 通过改变从检查的基板反射的第二光的偏振方向来产生第三光。