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公开(公告)号:US10650910B2
公开(公告)日:2020-05-12
申请号:US16249543
申请日:2019-01-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Changwook Jeong , Sanghoon Myung , Min-Chul Park , Jeonghoon Ko , Jisu Ryu , Hyunjae Jang , Hyungtae Kim , Yunrong Li , Min Chul Jeon
Abstract: A fault analysis method of a semiconductor fault analysis device is provided. The fault analysis method includes: receiving measurement data measured corresponding to a semiconductor device; generating double sampling data based on the measurement data and reference data; performing a fault analysis operation with respect to the double sampling data; classifying a fault type of the semiconductor device based on a result of the fault analysis operation; and outputting information about the fault type.