公开(公告)号：US20180114706A1

公开(公告)日：2018-04-26

申请号：US15495088

申请日：2017-04-24

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang Ryol YANG ,  Kyo Jun JEON ,  Kun Tack LEE ,  Jong Heun LIM

IPC: H01L21/673 ,  H01L21/67 ,  C23C16/455 ,  C23C16/458

CPC classification number: H01L21/6732 ,  C23C16/455 ,  C23C16/45521 ,  C23C16/4584 ,  C23C16/4586 ,  H01L21/67017 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67309

Abstract: A wafer boat assembly including a boat, a pedestal, and a base. The boat includes a slot to hold a wafer and a rod including a gas line. The pedestal includes a first surface and a connection line coupled to the gas line. The base is on a second surface of the pedestal, rotates the pedestal, and supplies gas to the connection line. The boat is on the first surface of the pedestal. The gas flows along the gas line and is dispensed from a location where the rod contacts the wafer to levitate the wafer.