公开(公告)号：US20200182777A1

公开(公告)日：2020-06-11

申请号：US16532662

申请日：2019-08-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jang Ik PARK ,  Kwang Rak KIM ,  Yoon Sung BAE ,  Young Hoon SOHN ,  Yu Sin YANG ,  Tae Yong JO

IPC: G01N21/27 ,  G01N21/95 ,  H01L21/66

Abstract: A substrate inspection apparatus includes a light irradiating unit irradiating first light to an inspection target on a stage, a light detecting unit detecting second light reflected by the inspection target, a spectrum generator generating a first spectrum from the second light, a noise filter module removing a noise signal from the first spectrum to generate a second spectrum, a spectrum analyzer determining a first calibration parameter and a first calibration value thereof from the second spectrum, and a hardware controller adjusting at least one of the stage, the light irradiating unit and the light detecting unit using the first calibration parameter and the first calibration value.

公开(公告)号：US20230028347A1

公开(公告)日：2023-01-26

申请号：US17684052

申请日：2022-03-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jang Ryul PARK ,  Soon Yang KWON ,  Kwang Rak KIM ,  Myung Jun LEE ,  Sung Ho JANG

IPC: G01N21/95 ,  G02B7/00

Abstract: A method for fabricating a semiconductor device is provided. The method includes: loading a substrate on a stage of an apparatus for inspecting the substrate; extracting a first light having a first wavelength from a light by using a light source; acquiring first position information on at least one focal point, formed on the substrate, based on the first wavelength by using a controller, the at least one focal point being a pre-calculated at least one focal point; adjusting a position of at least one from among an objective lens and at least one microsphere in a vertical direction by using the first position information in the controller; condensing the first light, which has passed through the at least one microsphere, on the at least one focal point formed on the substrate; and inspecting the substrate by using the first light condensed on the at least one focal point.