公开(公告)号：US20200182777A1

公开(公告)日：2020-06-11

申请号：US16532662

申请日：2019-08-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jang Ik PARK ,  Kwang Rak KIM ,  Yoon Sung BAE ,  Young Hoon SOHN ,  Yu Sin YANG ,  Tae Yong JO

IPC: G01N21/27 ,  G01N21/95 ,  H01L21/66

Abstract: A substrate inspection apparatus includes a light irradiating unit irradiating first light to an inspection target on a stage, a light detecting unit detecting second light reflected by the inspection target, a spectrum generator generating a first spectrum from the second light, a noise filter module removing a noise signal from the first spectrum to generate a second spectrum, a spectrum analyzer determining a first calibration parameter and a first calibration value thereof from the second spectrum, and a hardware controller adjusting at least one of the stage, the light irradiating unit and the light detecting unit using the first calibration parameter and the first calibration value.