公开(公告)号：US20240375890A1

公开(公告)日：2024-11-14

申请号：US18659935

申请日：2024-05-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyunyoung LEE ,  Jongseong KO ,  Daeyong KIM ,  Donghyun KIM ,  Jisu KIM ,  Pyungkang KIM ,  Kihong PARK ,  Jungjun PARK ,  Jungjoon PARK ,  Jooyoung PARK ,  Junhyeok PARK ,  Hoseok SONG ,  Chiho AHN ,  Kongwoo LEE ,  Chuyoung CHOUNG ,  Jeongmin HWANG

IPC: B65G49/00 ,  B25J11/00 ,  H01L21/67

Abstract: A maintenance automation equipment includes: a first module comprising: a first support supporting a modular device, a fastening device configured to separate or fasten the modular device, a first inspector comprising a camera, and a first transporter, wherein the fastening device and the first inspector are at one end of the first transporter; a second module comprising: a second support, a cleaning device configured to spray a chemical toward the second support, a second inspector comprising an optical camera, and a second transporter, wherein the cleaning device and the second inspector are at one end of the second transporter; a transport module comprising an inter-module transporter; a first storage module; and a second storage module.

公开(公告)号：US20230097418A1

公开(公告)日：2023-03-30

申请号：US17724214

申请日：2022-04-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jinhyuk CHOI ,  Kongwoo LEE ,  Beomsoo HWANG

IPC: F16K27/00 ,  F16K51/02 ,  F16K3/02

Abstract: A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.