公开(公告)号：US20240105524A1

公开(公告)日：2024-03-28

申请号：US18367229

申请日：2023-09-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyungjin KIM ,  Minhwan SEO ,  Wondon JOO ,  Jiyoung CHU ,  Sangwoo BAE ,  Sungmin AHN ,  Seungyeol OH ,  Jungyu LEE

IPC: H01L21/66 ,  G02B5/30 ,  G02B27/09 ,  G02B27/28 ,  H01L21/68

CPC classification number: H01L22/12 ,  G02B5/3083 ,  G02B27/0955 ,  G02B27/0977 ,  G02B27/283 ,  H01L21/681

Abstract: The optical device includes an illuminator configured to emit illumination light in a first horizontal direction, a polarizing prism configured to polarize the illumination light incident thereto through a first surface thereof in the first horizontal direction, a first reflector and a second reflector, each configured to reflect the illumination light from the polarizing prism, and a first lens and a second lens configured to condense the illumination light reflected from the first and second reflectors, respectively.

公开(公告)号：US20230094985A1

公开(公告)日：2023-03-30

申请号：US17836199

申请日：2022-06-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jiyoung CHU ,  Hyungjin KIM ,  Minhwan SEO ,  Wondon JOO ,  Sungmin AHN ,  Jiyoung KIM ,  Ono KAZUYA ,  Jungchul LEE

IPC: H01L21/68 ,  G01B11/27 ,  H01L23/544 ,  G06T7/00

Abstract: An optical apparatus includes a folding mirror configured to direct first and second illumination lights on first and second alignment marks respectively and reflect first and second reflected lights reflected from the first and second alignment marks in different horizontal directions respectively, first and second lenses arranged respectively in optical paths of the first and second reflected lights reflected from the first and second reflective surfaces of the folding mirror, first and second reflection portions configured to reflect the first and second reflected lights passing through the first and second lenses respectively, and a beam splitter prism configured to divide an illumination light incident through a first surface into the first and second illumination lights and direct to the first and second reflection portions, and transmit the first and second reflected lights reflected by the first and second reflection portions through a second surface.