公开(公告)号：US20240353350A1

公开(公告)日：2024-10-24

申请号：US18626396

申请日：2024-04-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kihong CHUNG ,  Gucheol KWON ,  Jaejoon KIM ,  Haemin JEONG ,  Minjae HUH ,  Hidong KWAK ,  Taejung PARK ,  Jihye LEE ,  Choonshik LEEM

IPC: G01N21/95 ,  G01N21/21 ,  G01N21/88 ,  H01L21/66

CPC classification number: G01N21/9501 ,  G01N21/211 ,  G01N21/8851 ,  H01L22/12 ,  G01N2021/8887

Abstract: A wafer abnormality detection method including: calculating a residual spectrum between a measured spectrum for a wafer and a predicted spectrum for the wafer; and performing machine learning to determine whether measurement data, which corresponds to the residual data, is abnormal.

公开(公告)号：US20190138892A1

公开(公告)日：2019-05-09

申请号：US16170081

申请日：2018-10-25

Applicant: Samsung Electronics Co., Ltd. ,  Postech Academy-Industry Foundation

Inventor： Sungho KIM ,  Jinseok KIM ,  Yulhwa KIM ,  Jaejoon KIM ,  Dusik PARK

IPC: G06N3/063 ,  G06N3/04

Abstract: A method of performing operations on a plurality of inputs and a same kernel using a delay time by using a same processor, and a neural network device thereof are provided, the neural network device includes input data including a first input and a second input, and a processor configured to obtain a first result by performing operations between the first input and a plurality of kernels, to obtain a second result by performing operations between the second input, which is received at a time delayed by a first interval from a time when the first input is received, and the plurality of kernels, and to obtain output data using the first result and the second result. The neural network device may include neuromorphic hardware and may perform convolutional neural network (CNN) mapping.