EUV photomask and method of forming mask pattern using the same

    公开(公告)号:US11733601B2

    公开(公告)日:2023-08-22

    申请号:US17308484

    申请日:2021-05-05

    CPC classification number: G03F1/24

    Abstract: An EUV photomask having a main area and a scribe lane area and reflecting EUV light includes a reflective multilayer film and an absorption pattern, wherein the scribe lane area includes first and second lanes, wherein the first lane includes first and second sub-lanes extending in the same direction as an extending direction of the first lane, wherein the first sub-lane includes a first dummy pattern that is a portion of the absorption pattern, and the second sub-lane includes a second dummy pattern that is a portion of the absorption pattern, and when EUV light that is not absorbed by the first and second dummy patterns and is reflected by the reflective multilayer film is irradiated at least twice by overlapping a negative tone photoresist, an amount of light exceeds a threshold dose of light in the negative tone photoresist corresponding to the first lane.

    Hinge structure and electronic device including the same

    公开(公告)号:US11788330B2

    公开(公告)日:2023-10-17

    申请号:US17425623

    申请日:2021-07-20

    CPC classification number: E05D3/122 E05D3/18 E05D11/105 E05Y2900/606

    Abstract: A hinge structure is provided. The hinge structure includes a fixed structure including a first guide rail and a second guide rail, a center of an arc of the first guide rail is a first axis of rotation parallel to an axial direction and a center of an arc of the second guide rail is a second axis of rotation parallel to the axial direction, a first rotary structure including a first guide portion accommodated in the first guide rail and a first helical groove extending around and along the first axis of rotation, a second rotary structure including a second guide portion accommodated in the second guide rail and a second helical groove extending around and along the second axis of rotation, and a sliding structure including a first guide protrusion accommodated in the first helical groove and a second guide protrusion accommodated in the second helical groove.

    Head mounted display apparatus and operating method thereof

    公开(公告)号:US11048094B2

    公开(公告)日:2021-06-29

    申请号:US16265115

    申请日:2019-02-01

    Abstract: Provided are a head mounted display (HMD) apparatus and an operating method thereof. The HMD apparatus including: a band; at least one sensor; and a processor configured to control the HMD apparatus to, based on a user's face approaching an inside surface of the HMD apparatus being sensed by the at least one sensor, rotate the band from a folded state to an unfolded state extending toward the back of the user's head, and to adjust a length of the band in the unfolded state such that the band in the unfolded state comes in contact with the user's head.

    SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME

    公开(公告)号:US20170103987A1

    公开(公告)日:2017-04-13

    申请号:US15237709

    申请日:2016-08-16

    Abstract: A method for manufacturing a semiconductor device includes forming first and second lower structures including selection elements on first and second chip regions of a substrate, respectively, forming first and second mold layers on the first and second lower structures, respectively, forming first and second support layers on the first and second mold layers, respectively, patterning the first support layer and the first mold layer to form first holes exposing the first lower structure, forming first lower electrodes in the first holes, forming a support pattern including at least one opening by selectively patterning the first support layer while leaving the second support layer, and removing the first mold layer through the opening. A top surface of the support pattern is disposed at a substantially same level as a top surface of the second support layer.

    Hinge structure and electronic device including the same

    公开(公告)号:US12168903B2

    公开(公告)日:2024-12-17

    申请号:US18485783

    申请日:2023-10-12

    Abstract: A hinge structure is provided. The hinge structure includes a fixed structure including a first guide rail and a second guide rail, a center of an arc of the first guide rail is a first axis of rotation parallel to an axial direction and a center of an arc of the second guide rail is a second axis of rotation parallel to the axial direction, a first rotary structure including a first guide portion accommodated in the first guide rail and a first helical groove extending around and along the first axis of rotation, a second rotary structure including a second guide portion accommodated in the second guide rail and a second helical groove extending around and along the second axis of rotation, and a sliding structure including a first guide protrusion accommodated in the first helical groove and a second guide protrusion accommodated in the second helical groove.

    Electronic device including hinge module

    公开(公告)号:US12032417B2

    公开(公告)日:2024-07-09

    申请号:US17832183

    申请日:2022-06-03

    Abstract: An electronic device is provided. The electronic device includes a housing including first and second housings, a display including a first display region connected to the first housing and a second display region connected to the second housing, and a hinge module connected to the first housing and the second housing. The hinge module may include a rotation bracket including a first accommodation space providing a first rotation axis and a second accommodation space providing a second rotation axis, a rotation member including a first rotation member connected to the first display region and a second rotation member connected to the second display region, and a rail member including a first rail member connected to the first rotation member and configured to rotate in the first accommodation space, and a second rail member connected to the second rotation member and configured to rotate in the second accommodation space.

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