APPARATUS AND METHOD FOR DETECTING FINE PARTICLES

    公开(公告)号:US20240219282A1

    公开(公告)日:2024-07-04

    申请号:US18202794

    申请日:2023-05-26

    CPC classification number: G01N15/0205

    Abstract: Provided is an apparatus configured to detect fine particles, including a fine particle trap including a plurality of through holes that are configured to trap the fine particles, a measurer including a light source configured to emit light to the plurality of through holes, and a detector configured to detect light scattered, reflected, or transmitted through the plurality of through holes and measure a spectrum, and a processor configured to estimate a number of the fine particles trapped in the plurality of through holes based on of the measured spectrum, wherein the plurality of through holes have a diameter equal to or less than 10 μm.

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