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    Mechanical component and method for adjusting an adjustable part at least about one axis of rotation
    2.
    发明授权
    Mechanical component and method for adjusting an adjustable part at least about one axis of rotation 有权

    公开(公告)号：US10274722B2

    公开(公告)日：2019-04-30

    申请号：US15646217

    申请日：2017-07-11

    申请人： Robert Bosch GmbH

    发明人： Florian Grabmaier ,  Philipp Troebner ,  Christian Ohl

    IPC分类号： G02B26/08 ,  H01F7/02 ,  H01F7/122 ,  H01F7/14

    摘要： A mechanical component having an adjustable part and a magnetic actuator device having at least one first permanent-magnetic element, which is able to be set into a first adjustment motion, whereby the adjustable part is able to be set into a first co-adjustment motion about a first axis of rotation, and wherein the magnetic actuator device includes at least one first external permanent magnet, which induces a first magnetic field and is able to be set into a first excitation motion such that the at least one first permanent-magnetic element is able to be set into the first adjustment motion. A production method for a mechanical component and a method for adjusting an adjustable part at least about a first axis of rotation in relation to its support, are also described.

    MECHANICAL COMPONENT AND METHOD FOR ADJUSTING AN ADJUSTABLE PART AT LEAST ABOUT ONE AXIS OF ROTATION
    3.
    发明申请
    MECHANICAL COMPONENT AND METHOD FOR ADJUSTING AN ADJUSTABLE PART AT LEAST ABOUT ONE AXIS OF ROTATION 审中-公开

    公开(公告)号：US20180017782A1

    公开(公告)日：2018-01-18

    申请号：US15646217

    申请日：2017-07-11

    申请人： Robert Bosch GmbH

    发明人： Florian Grabmaier ,  Philipp Troebner ,  Christian Ohl

    IPC分类号： G02B26/08 ,  H01F7/02

    CPC分类号： G02B26/0833 ,  G02B26/085 ,  H01F7/0242 ,  H01F7/122 ,  H01F7/14

    摘要： A mechanical component having an adjustable part and a magnetic actuator device having at least one first permanent-magnetic element, which is able to be set into a first adjustment motion, whereby the adjustable part is able to be set into a first co-adjustment motion about a first axis of rotation, and wherein the magnetic actuator device includes at least one first external permanent magnet, which induces a first magnetic field and is able to be set into a first excitation motion such that the at least one first permanent-magnetic element is able to be set into the first adjustment motion. A production method for a mechanical component and a method for adjusting an adjustable part at least about a first axis of rotation in relation to its support, are also described.

    Vertically hybridly integrated assembly having an interposer for stress-decoupling of a MEMS structure, and method for its manufacture
    10.
    发明授权
    Vertically hybridly integrated assembly having an interposer for stress-decoupling of a MEMS structure, and method for its manufacture 有权
    具有用于MEMS结构的应力解耦的插入件的垂直混合集成组件及其制造方法

    公开(公告)号：US09499398B2

    公开(公告)日：2016-11-22

    申请号：US14735891

    申请日：2015-06-10

    申请人： Robert Bosch GmbH

    发明人： Florian Grabmaier

    IPC分类号： H01L23/48 ,  H01L21/768 ,  B81B7/00 ,  B81C1/00

    CPC分类号： B81C1/00238 ,  B81C2203/0792

    摘要： A structural concept for a vertically hybridly integrated assembly having at least one MEMS component is provided, whose MEMS structure is developed at least partially in the front side of the component and which is electrically contactable via at least one connection pad on the front side of the component. This structural concept is able to be realized in an uncomplicated and cost-effective manner and allows the largely stress-free mounting of the MEMS structure within the chip stack and also ensures a reliable electrical linkage of the MEMS component to further component parts of the assembly. For this purpose, the structural concept provides for mounting the MEMS assembly headfirst on a further component of the chip stack via an interposer and for electrically linking it to the further component via at least one plated contacting in the interposer.

    摘要翻译： 提供了具有至少一个MEMS部件的垂直混合集成组件的结构概念，其MEMS结构至少部分地在部件的前侧被展开，并且可通过至少一个连接焊盘 零件。 该结构概念能够以不复杂和成本有效的方式实现，并且允许MEMS结构在芯片堆叠内大大地无应力地安装，并且还确保MEMS组件与组件的更多部件的可靠电连接 。 为此，结构概念提供了通过插入件将MEMS组件首先安装在芯片堆叠的另一部件上，并通过插入件中的至少一个电镀接触将其组装到另一部件上。