Substrate perforation system and method using polygon mirror(s)

    公开(公告)号:US11237386B2

    公开(公告)日:2022-02-01

    申请号:US16815874

    申请日:2020-03-11

    申请人: ROHR, INC.

    IPC分类号: G02B26/12 G02B26/10 G02B5/09

    摘要: Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

    SUBSTRATE PERFORATION SYSTEM & METHOD USING POLYGON MIRROR(S)

    公开(公告)号:US20210286172A1

    公开(公告)日:2021-09-16

    申请号:US16815874

    申请日:2020-03-11

    申请人: ROHR, INC.

    IPC分类号: G02B26/12 G02B26/10

    摘要: Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

    COLLECTING / REMOVING BYPRODUCTS OF LASER ABLATION
    9.
    发明申请
    COLLECTING / REMOVING BYPRODUCTS OF LASER ABLATION 有权
    收集/删除激光雷射的产物

    公开(公告)号:US20160221121A1

    公开(公告)日:2016-08-04

    申请号:US14609154

    申请日:2015-01-29

    申请人: Rohr, Inc.

    摘要: A method is provided for operating a laser system. During an embodiment of this method, inert gas is directed against an object within a cavity of a collection device. An aperture is formed in the object by ablating the object with a laser beam that travels within the cavity and to the object. Byproducts of the ablation are removed from the cavity. During another embodiment of the method, inert gas is pooled against an object and a gas curtain is provided proximate a lens. The object is cut using a laser beam which travels from the lens, through the gas curtain and the pooled inert gas, to the object. Fumes and/or particulates produced by the formation are directed away from the laser beam.

    摘要翻译: 提供了一种操作激光系统的方法。 在该方法的实施例中,惰性气体被引导到收集装置的空腔内的物体。 通过在腔内和物体之间行进的激光束烧蚀物体,在物体中形成孔。 消融的副产物从空腔中去除。 在该方法的另一个实施例中,将惰性气体汇集在物体上,并且靠近透镜设置气幕。 使用从透镜,通过气幕和合并的惰性气体传播到该物体的激光束切割物体。 由地层产生的烟雾和/或微粒被引导离开激光束。