Substrate perforation system and method using polygon mirror(s)

    公开(公告)号:US11237386B2

    公开(公告)日:2022-02-01

    申请号:US16815874

    申请日:2020-03-11

    申请人: ROHR, INC.

    IPC分类号: G02B26/12 G02B26/10 G02B5/09

    摘要: Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

    SUBSTRATE PERFORATION SYSTEM & METHOD USING POLYGON MIRROR(S)

    公开(公告)号:US20210286172A1

    公开(公告)日:2021-09-16

    申请号:US16815874

    申请日:2020-03-11

    申请人: ROHR, INC.

    IPC分类号: G02B26/12 G02B26/10

    摘要: Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.