ULTRASONIC SENSOR WITH TUNABLE METAL LAYER THICKNESS TO MATCH ULTRASONIC FREQUENCY

    公开(公告)号:US20240424529A1

    公开(公告)日:2024-12-26

    申请号:US18339878

    申请日:2023-06-22

    Abstract: An apparatus includes an ultrasonic sensor stack configured to transmit and receive ultrasonic waves. The ultrasonic sensor stack includes at least a thin film transistor layer, a piezoelectric layer, and a thin electrode layer. The ultrasonic sensor stack further includes a tunable metal layer coupled to the thin electrode layer and an acoustic layer coupled to the tunable metal layer, where the tunable metal layer has a thickness greater than a thickness of the thin electrode layer. The thickness of the tunable metal layer may be configured to match a peak frequency in an ultrasonic frequency range of the ultrasonic waves transmitted by the ultrasonic sensor stack. In some implementations, the tunable metal layer includes a copper layer and the acoustic layer includes polyimide or polyethylene terephthalate.

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