公开(公告)号：US20160126137A1

公开(公告)日：2016-05-05

申请号：US14993065

申请日：2016-01-11

Applicant: QUALCOMM Incorporated

Inventor： John J. ZHU ,  Zhongze WANG ,  Da YANG

IPC: H01L21/768

CPC classification number: H01L21/76894 ,  G03F7/7045 ,  G03F7/70466 ,  H01L21/28123 ,  H01L21/283 ,  H01L21/31 ,  H01L21/469 ,  H01L21/76892 ,  H01L21/76895 ,  H01L23/50 ,  H01L24/27 ,  H01L24/31 ,  H01L2924/0002 ,  H01L2924/12042 ,  H01L2924/00

Abstract: Features are fabricated on a semiconductor chip. The features are smaller than the threshold of the lithography used to create the chip. A method includes patterning a first portion of a feature (such as a local interconnect) and a second portion of the feature to be separated by a predetermined distance, such as a line tip to tip space or a line space. The method further includes patterning the first portion with a cut mask to form a first sub-portion (e.g., a contact) and a second sub-portion. A dimension of the first sub-portion is less than a dimension of a second predetermined distance, which may be a line length resolution of a lithographic process having a specified width resolution. A feature of a semiconductor device includes a first portion and a second portion having a dimension less than a lithographic resolution of the first portion.

Abstract translation: 特征是在半导体芯片上制造的。 这些特征小于用于制造芯片的光刻的阈值。 一种方法包括图案化特征（例如局部互连）的第一部分和要分离预定距离的特征的第二部分，例如线尖到尖端空间或线空间。 该方法还包括用切割掩模图案化第一部分以形成第一子部分（例如，接触）和第二子部分。 第一子部分的尺寸小于第二预定距离的尺寸，其可以是具有指定宽度分辨率的光刻工艺的线长分辨率。 半导体器件的特征包括具有小于第一部分的光刻分辨率的尺寸的第一部分和第二部分。

公开(公告)号：US20150028452A1

公开(公告)日：2015-01-29

申请号：US14512191

申请日：2014-10-10

Applicant: QUALCOMM INCORPORATED

Inventor： John J. ZHU ,  Bin YANG ,  PR CHIDAMBARAM ,  Lixin GE ,  Jihong CHOI

IPC: H01L23/522 ,  H01L49/02

CPC classification number: H01L23/538 ,  H01L23/5223 ,  H01L27/0805 ,  H01L28/40 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A complementary back end of line (BEOL) capacitor (CBC) structure includes a metal oxide metal (MOM) capacitor structure. The MOM capacitor structure is coupled to a first upper interconnect layer of an interconnect stack of an integrated circuit (IC) device. The MOM capacitor structure includes a lower interconnect layer of the interconnect stack. The CBC structure also includes a second upper interconnect layer of the interconnect stack coupled to the MOM capacitor structure. The CBC structure also includes a metal insulator metal (MIM) capacitor layer between the first upper interconnect layer and the second upper interconnect layer. In addition, CBC structure also includes a MIM capacitor structure coupled to the MOM capacitor structure. The MIM capacitor structure includes a first capacitor plate having a portion of the first upper interconnect layer, and a second capacitor plate having a portion of the MIM capacitor layer(s).

Abstract translation: 互补的后端（BEOL）电容器（CBC）结构包括金属氧化物金属（MOM）电容器结构。 MOM电容器结构耦合到集成电路（IC）器件的互连堆叠的第一上互连层。 MOM电容器结构包括互连叠层的下互连层。 CBC结构还包括耦合到MOM电容器结构的互连叠层的第二上互连层。 CBC结构还包括在第一上部互连层和第二上部互连层之间的金属绝缘体金属（MIM）电容器层。 此外，CBC结构还包括耦合到MOM电容器结构的MIM电容器结构。 MIM电容器结构包括具有第一上部互连层的一部分的第一电容器板和具有MIM电容器层的一部分的第二电容器板。