Angular velocity sensor and method for correcting angular velocity sensor

    公开(公告)号:US10359285B2

    公开(公告)日:2019-07-23

    申请号:US15219446

    申请日:2016-07-26

    Abstract: An angular velocity sensor including a vibration body having a sensor electrode, a driving electrode, and a monitor electrode. The monitor electrode generates a signal according to vibration of the vibration body. The sensor circuit outputs a signal representing an angular velocity applied to the vibration body. The amplitude determination circuit measures amplitude of vibration of the vibration body. A PLL circuit includes a constant voltage source for generating a constant voltage, a timing switching unit for outputting a voltage by switching selectively between the constant voltage and a voltage corresponding to the monitor signal, and a voltage-controlled oscillator for outputting an oscillation signal having a frequency corresponding to the voltage output from the timing switching unit. When the amplitude measured is smaller than a predetermined value, the timing switching unit outputs the constant voltage output from the constant voltage source and outputs a start-up mode signal.

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