公开(公告)号：US11692958B2

公开(公告)日：2023-07-04

申请号：US17354925

申请日：2021-06-22

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shinya Suzuki ,  Kiyokazu Itoi ,  Daisuke Suetsugu ,  Norimichi Noguchi ,  Nobutoshi Takagi

IPC: G01N27/12 ,  G01N33/00

CPC classification number: G01N27/125 ,  G01N33/005

Abstract: A gas sensor device includes: a first electrode; a second electrode; a metal oxide layer that is disposed between the first electrode and the second electrode and is in contact with the first electrode and the second electrode; an interlayer insulating film that covers a part of the first electrode, a part of the second electrode, and a part of the metal oxide layer; and a hydrogen permeable film that allows only hydrogen to permeate, a local region that is in contact with the second electrode is provided inside the metal oxide layer, the local region having a higher oxygen deficiency than an oxygen deficiency of the other region in the metal oxide layer, an opening that exposes a gas contact portion which is a part of a main surface of the second electrode is provided in the interlayer insulating film, and the hydrogen permeable film is provided to cover at least the gas contact portion.