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公开(公告)号:US20230076794A1
公开(公告)日:2023-03-09
申请号:US17882309
申请日:2022-08-05
Inventor: Hideki UEDA , Koichiro NAKASHIMA
IPC: G01P3/483
Abstract: A sensor device includes a conductive layer. The conductive layer is interposed between a first principal surface of an IC chip and a sensor element and faces the sensor element via a resin-based adhesive layer. The sensor element includes: a moving part including a moving electrode; a fixed part including a fixed electrode forming capacitance between the moving electrode and itself; a first terminal connected to the moving electrode; and a second terminal connected to the fixed electrode. The IC chip includes: a signal processor that processes a detection signal from the second terminal; a first voltage generator that generates a first voltage as an operating voltage for the processor; and a second voltage generator that generates a second voltage corresponding to the sensor element's reference potential applied to the first terminal. The conductive layer is electrically connected to the first terminal.
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公开(公告)号:US20220057211A1
公开(公告)日:2022-02-24
申请号:US17415340
申请日:2020-02-04
Inventor: Koichiro NAKASHIMA , Takashi UCHIDA , Yusuke NAKAMURA , Hideki UEDA , Naruhito NODA , Toshitsugu KONISHI , Toshio YAMAZAKI
IPC: G01C19/5783 , G01C19/5684 , B81B7/00
Abstract: A sensor device includes a sensor element, a substrate, and a bonding wire. Over the substrate, provided is the sensor element. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the substrate together. The bonding wire is provided to connect two connection surfaces that intersect with each other.
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公开(公告)号:US20170276696A1
公开(公告)日:2017-09-28
申请号:US15617777
申请日:2017-06-08
Inventor: Hitoshi YOSHIDA , Nobuyuki IBARA , Hideki UEDA , Takeshi OKADA , Takeshi MORI , Masatoshi NOMURA , Katsumi KAKIMOTO , Yuji SUZUKI
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US20220364864A1
公开(公告)日:2022-11-17
申请号:US17774381
申请日:2020-11-06
Inventor: Hideki UEDA , Yusuke NAKAMURA , Koichiro NAKASHIMA , Takashi UCHIDA , Toshio YAMAZAKI , Hiroyuki FUJII , Chikara NARA
IPC: G01C19/5783 , B81B7/00
Abstract: A sensor device includes a sensor element, a supporting member, a substrate, and a bonding wire. The supporting member is electrically connected to the sensor element. The substrate is electrically connected to the supporting member. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the supporting member together. The substrate and an installation member on which the sensor element is installed intersect with each other. The sensor element and the supporting member are separated from each other.
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