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公开(公告)号：US11358858B2
公开(公告)日：2022-06-14
申请号：US16751567
申请日：2020-01-24
Inventor： Amir Rahafrooz , Thomas Kieran Nunan , Diego Emilio Serrano , Ijaz Jafri
IPC: B81B3/00 , B81C1/00 , G01C19/5719
Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor layer having a first-type region and a second-type region that are stacked and interface with each other to form a p-n junction, the first-type region defining a first side of the semiconductor layer and the second-type region defining a second side of the semiconductor layer. The method further includes providing an insulating layer on the second side of the semiconductor layer and etching the semiconductor layer from the first side of the semiconductor layer toward the second side of the semiconductor layer to form a trench. The first-type region corresponds to one of a n-type region and a p-type region, and the second-type region corresponds to the other of the n-type region and the p-type region.
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Patent Agency Ranking
公开(公告)号：US11125579B2
公开(公告)日：2021-09-21
申请号：US16369685
申请日：2019-03-29
Inventor： Ronald Joseph Lipka , Diego Emilio Serrano
IPC: G01C25/00 , H03F3/45 , G01C19/5712
Abstract: An aspect of the present disclosure concerns a calibration system including a test tone signal generator that produces a test tone; a transimpedance amplifier (TIA) that comprises two input terminals, receives two output signals from an external sensor device, the test tone, and a calibration signal at the two input terminals, and produces a voltage signal; and a calibration circuit that receives the voltage signal and the test tone to produce the calibration signal that causes the TIA to produce the voltage signal such that an error signal included in the voltage signal is canceled. The external sensor device may be a mode-matched vibratory micro-electro-mechanical systems (MEMS) gyroscope.
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公开(公告)号：US20200309563A1
公开(公告)日：2020-10-01
申请号：US16369685
申请日：2019-03-29
Inventor： Ronald Joseph Lipka , Diego Emilio Serrano
IPC: G01C25/00 , H03F3/45 , G01C19/5712
Abstract: An aspect of the present disclosure concerns a calibration system including a test tone signal generator that produces a test tone; a transimpedance amplifier (TIA) that comprises two input terminals, receives two output signals from an external sensor device, the test tone, and a calibration signal at the two input terminals, and produces a voltage signal; and a calibration circuit that receives the voltage signal and the test tone to produce the calibration signal that causes the TIA to produce the voltage signal such that an error signal included in the voltage signal is canceled. The external sensor device may be a mode-matched vibratory micro-electro-mechanical systems (MEMS) gyroscope.
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4.发明授权公开(公告)号：US12244315B2
公开(公告)日：2025-03-04
申请号：US18149275
申请日：2023-01-03
Inventor： Duane Younkin , Ronald Joseph Lipka , Ryan Hennessy , Diego Emilio Serrano , Chihchuan Che , Amir Rahafrooz , Mohammad Maymandi Nejad
Abstract: Systems and methods disclosed herein include a correction circuit. The correction circuit may include frequency division circuitry that is configured to receive and condition a reference signal. The correction circuit may include drive circuitry that is configured to receive the reference signal. The correction circuit may include a first resonator that is configured to receive the reference signal. The correction circuit may include sense circuitry that is configured to receive the reference signal from the first resonator. The correction circuit may include phase detector circuitry that is configured to generate at least one output signal based on receipt of a plurality of input signals from the drive circuitry and the sense circuitry. The correction circuit may include a proportional integral derivative controller that is configured to generate a temperature correction signal to correct frequency error in an oscillator based on receipt of the at least one output signal.
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公开(公告)号：US11725941B2
公开(公告)日：2023-08-15
申请号：US17420751
申请日：2019-12-27
Inventor： Amir Rahafrooz , Diego Emilio Serrano , Ijaz Hussain Jafri
IPC: G01C19/5712 , G01P1/00 , G01P15/125
CPC classification number: G01C19/5712 , G01P1/00 , G01P15/125
Abstract: A sensing device includes a resonant member that is movable in a first mode and a second mode, and an electrode. The resonant member has a capacitive surface portion that faces and is capacitively coupled to a capacitive surface portion of the electrode. Displacement for each point along the capacitive surface portion of the resonant member in the first mode is substantially tangent to the point.
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公开(公告)号：US11614328B2
公开(公告)日：2023-03-28
申请号：US17420790
申请日：2019-12-27
Inventor： Sagnik Pal , Diego Emilio Serrano , Thomas Kieran Nunan
IPC: G01P1/00 , G01C19/5712 , G01P15/125
Abstract: A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.
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