公开(公告)号：US11614328B2

公开(公告)日：2023-03-28

申请号：US17420790

申请日：2019-12-27

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Sagnik Pal ,  Diego Emilio Serrano ,  Thomas Kieran Nunan

IPC: G01P1/00 ,  G01C19/5712 ,  G01P15/125

Abstract: A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.