公开(公告)号：US09201236B2

公开(公告)日：2015-12-01

申请号：US13686464

申请日：2012-11-27

Applicant: Pixtronix, Inc.

Inventor： Joyce H. Wu ,  Jasper L. Steyn ,  Eugene E. Fike ,  Cait Ni Chleirigh ,  Timothy Brosnihan ,  Richard S. Payne

IPC: G02B26/08 ,  G02B26/02 ,  G06F15/00 ,  G06F3/01

CPC classification number: G02B26/02 ,  G02B26/023 ,  G02B26/0841 ,  G06F3/01 ,  G06F15/00

Abstract: A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.

Abstract translation: 显示装置包括设置在由基板的表面限定的第一表面上的多个机电系统（EMS）装置。 每个EMS装置包括可在基本上平行于第一表面的平面中移动的部件。 该装置还包括靠近基板定位的第二表面，使得多个EMS装置位于第一表面和第二表面之间。 此外，每个EMS装置包括位于可移动部件和第二表面之间的至少一个防静电突起。

公开(公告)号：US20150108479A1

公开(公告)日：2015-04-23

申请号：US14061415

申请日：2013-10-23

Applicant: Pixtronix, Inc.

Inventor： Patrick F. Brinkley ,  Wilhelmus A. De Groot ,  Jasper L. Steyn ,  Elif Selin Mungan

IPC: H01L27/12 ,  H01L29/66 ,  H01L29/786

CPC classification number: H01L27/1218 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0742 ,  B81C2203/0778 ,  G02B26/023 ,  H01L27/1255 ,  H01L29/6675 ,  H01L29/78603 ,  H01L29/78642

Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical systems (EMS) displays where the area of a substrate occupied by a pixel circuit can be reduced if portions of the pixel circuit can be built in three dimensions. In some aspects, certain EMS displays can incorporate structures that are substantially normal to the surface of a substrate. Incorporating circuit components, such as transistors, into such structures, can reduce the area they occupy within the plane of the substrate. In some aspects, the components of a transistor can be fabricated directly into a MEMS anchor that supports a light modulator or a portion of an actuator over the substrate. In some other aspects, the transistor can be fabricated on one or more sidewalls of any MEMS structure.

Abstract translation: 本公开提供了用于形成机电系统（EMS）显示器的系统，方法和装置，其中像素电路占据的基板的面积可以减小，如果像素电路的部分可以被构建在三维中。 在一些方面，某些EMS显示器可以结合基本上垂直于基底表面的结构。 将诸如晶体管的电路组件结合到这种结构中可以减少它们在衬底的平面内占据的面积。 在一些方面，晶体管的部件可以直接制造成支撑光调制器或致动器的一部分在衬底上的MEMS锚。 在一些其他方面，晶体管可以制造在任何MEMS结构的一个或多个侧壁上。

公开(公告)号：US20140145926A1

公开(公告)日：2014-05-29

申请号：US13686464

申请日：2012-11-27

Applicant: PIXTRONIX, INC.

Inventor： Joyce H. Wu ,  Jasper L. Steyn ,  Eugene E. Fike ,  Cait Ni Chleirigh ,  Timothy Brosnihan ,  Richard S. Payne

IPC: G02B26/02 ,  G06F3/01 ,  G06F15/00

CPC classification number: G02B26/02 ,  G02B26/023 ,  G02B26/0841 ,  G06F3/01 ,  G06F15/00

Abstract: A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.

Abstract translation: 显示装置包括设置在由基板的表面限定的第一表面上的多个机电系统（EMS）装置。 每个EMS装置包括可在基本上平行于第一表面的平面中移动的部件。 该装置还包括靠近基板定位的第二表面，使得多个EMS装置位于第一表面和第二表面之间。 此外，每个EMS装置包括位于可移动部件和第二表面之间的至少一个防静电突起。

公开(公告)号：US09235046B2

公开(公告)日：2016-01-12

申请号：US13754548

申请日：2013-01-30

Applicant: Pixtronix, Inc.

Inventor： Javier Villarreal ,  Timothy J. Brosnihan ,  Jasper L. Steyn ,  Richard S. Payne ,  Stephen R. Lewis

IPC: G06F3/038 ,  G09G5/00 ,  G02B26/02 ,  G09G3/22 ,  B81B3/00

CPC classification number: G02B26/02 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0163 ,  B81B2203/051 ,  B81C2201/053 ,  B81C2201/112 ,  G02B26/023 ,  G09G3/22

Abstract: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

Abstract translation: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统，方法和装置。 在从快门组件形成的牺牲模具释放之前，将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触，所以这些主表面没有涂覆保护涂层。 因此，当快门组件最终被释放时，所产生的柔性梁相对较薄并且较不硬，从而降低用于操作闸板组件的致动电压。 在一些情况下，保护性涂层在释放之前被图案化成不连续段。

公开(公告)号：US09202821B2

公开(公告)日：2015-12-01

申请号：US14061415

申请日：2013-10-23

Applicant: Pixtronix, Inc.

Inventor： Patrick F. Brinkley ,  Wilhelmus A. De Groot ,  Jasper L. Steyn ,  Elif Selin Mungan

IPC: H01L27/12 ,  H01L29/66 ,  H01L29/786 ,  B81C1/00 ,  G02B26/02

CPC classification number: H01L27/1218 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0742 ,  B81C2203/0778 ,  G02B26/023 ,  H01L27/1255 ,  H01L29/6675 ,  H01L29/78603 ,  H01L29/78642

Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical systems (EMS) displays where the area of a substrate occupied by a pixel circuit can be reduced if portions of the pixel circuit can be built in three dimensions. In some aspects, certain EMS displays can incorporate structures that are substantially normal to the surface of a substrate. Incorporating circuit components, such as transistors, into such structures, can reduce the area they occupy within the plane of the substrate. In some aspects, the components of a transistor can be fabricated directly into a MEMS anchor that supports a light modulator or a portion of an actuator over the substrate. In some other aspects, the transistor can be fabricated on one or more sidewalls of any MEMS structure.

Abstract translation: 本公开提供了用于形成机电系统（EMS）显示器的系统，方法和装置，其中像素电路占据的基板的面积可以减小，如果像素电路的部分可以被构建在三维中。 在一些方面，某些EMS显示器可以结合基本上垂直于基底表面的结构。 将诸如晶体管的电路组件结合到这种结构中可以减少它们在衬底的平面内占据的面积。 在一些方面，晶体管的部件可以直接制造成支撑光调制器或致动器的一部分在衬底上的MEMS锚。 在一些其他方面，晶体管可以制造在任何MEMS结构的一个或多个侧壁上。

公开(公告)号：US20140210864A1

公开(公告)日：2014-07-31

申请号：US13754548

申请日：2013-01-30

Applicant: PIXTRONIX, INC.

Inventor： Javier Villarreal ,  Timothy J. Brosnihan ,  Jasper L. Steyn ,  Richard S. Payne ,  Stephen R. Lewis

IPC: G02B26/02 ,  G09G3/22

CPC classification number: G02B26/02 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0163 ,  B81B2203/051 ,  B81C2201/053 ,  B81C2201/112 ,  G02B26/023 ,  G09G3/22

Abstract: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

Abstract translation: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统，方法和装置。 在从快门组件形成的牺牲模具释放之前，将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触，所以这些主表面没有涂覆保护涂层。 因此，当快门组件最终被释放时，所产生的柔性梁相对较薄并且较不硬，从而降低用于操作闸板组件的致动电压。 在一些情况下，保护性涂层在释放之前被图案化成不连续段。