Abstract:
This disclosure provides systems, methods and apparatus for providing multiple dielectric coatings for a shutter assembly. The multiple dielectric coatings include an outer dielectric coating and one or more inner dielectric coatings. The outer dielectric coating has an electrical trap density that is lower than electrical trap densities of the one or more inner dielectric coatings. The lower electrical trap density reduces the amount of charge buildup over various surfaces of the shutter assembly. This reduction in charge buildup also reduces electrostatic forces that may cause incorrect operation of the shutter assembly.
Abstract:
A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.
Abstract:
A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.
Abstract:
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
Abstract:
Systems, apparatuses and methods are provided for increasing the aperture ratio of a display by increasing the total travel distance of respective light modulating bodies in a display while maintaining fast switching speeds. Increasing the total travel distance allows for a larger aperture ratio in a display, which provides greater power savings and increased display brightness. The total travel distance of a light modulating body includes the distance the body travels from an open position to a closed position, and vice-versa. In one example, the travel distance of a light modulating body (e.g., any of the light modulators as described above) is asymmetric: from a neutral position, the body travels a greater distance in a first direction than in a second direction.
Abstract:
The invention relates to a light modulator including a substrate having a surface and a modulation assembly coupled to the substrate that includes a modulation element and a first compliant beam. The first compliant beam includes a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor. The length of the first segment is different than the length of the second segment.
Abstract:
This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include a compliant inner beam electrode positioned between a movable beam electrode and a fixed beam electrode. A first voltage is applied to the movable beam electrode, and a sufficiently different voltage is applied to one of the compliant beam electrode and the fixed outer beam electrode. During actuation, the movable beam electrode is drawn towards the compliant inner beam electrode, while the combination of the movable beam electrode and the compliant inner beam electrode are further drawn to the fixed beam electrode.
Abstract:
This disclosure provides systems, methods and apparatus for incorporating tip-gap adjustment features (TGAF) in actuators of shutter assemblies. The TGAF are incorporated into a drive beam of the actuator during the formation of the shutter assembly over a mold. The TGAF are configured such that they develop a mechanical stress or stress gradient. When the shutter assembly is released from the mold, the stress or stress gradient in the TGAF bend the drive beam such that a tip-gap between the drive beam and a load beam of the actuator is reduced. The reduced tip-gap, in turn, reduces an actuation voltage needed to actuate the shutter assembly.
Abstract:
This disclosure provides systems, methods and apparatus for incorporating tip-gap adjustment features (TGAF) in actuators of shutter assemblies. The TGAF are incorporated into a drive beam of the actuator during the formation of the shutter assembly over a mold. The TGAF are configured such that they develop a mechanical stress or stress gradient. When the shutter assembly is released from the mold, the stress or stress gradient in the TGAF bend the drive beam such that a tip-gap between the drive beam and a load beam of the actuator is reduced. The reduced tip-gap, in turn, reduces an actuation voltage needed to actuate the shutter assembly.
Abstract:
An electromechanical device includes a movable body that is movable along an axis of a direction of motion. The device also includes an actuator beam and a compliant support beam arranged to support the movable body. The compliant support beam includes a first end connected to an anchor and an actuating portion extending from the anchor and in a direction that is transverse to the axis of the direction of motion and away from the anchor. The actuating portion is also arranged adjacently and spaced apart from the actuator beam. The compliant support beam also includes a connector portion that is contiguous with the actuating portion and coupled to the movable body. The connector portion extends at least partially back toward the anchor while being arranged adjacently and spaced apart from the actuating portion.