公开(公告)号：US20200080949A1

公开(公告)日：2020-03-12

申请号：US16609728

申请日：2018-12-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: G01N23/2251 ,  H01J37/073 ,  H01J37/244

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：US11150204B2

公开(公告)日：2021-10-19

申请号：US16609728

申请日：2018-12-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: G01N23/2251 ,  H01J37/073 ,  H01J37/244 ,  H01J37/22 ,  H01J37/252

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：US20210035766A1

公开(公告)日：2021-02-04

申请号：US16500789

申请日：2018-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Tomoaki Kawamata ,  Haruka Shikano

IPC: H01J1/94 ,  H01J3/02

Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.

公开(公告)号：US12198889B2

公开(公告)日：2025-01-14

申请号：US17044850

申请日：2020-05-08

Applicant: Photo electron Soul Inc.

Inventor： Atsushi Koizumi ,  Hokuto Iijima

IPC: H01J37/073 ,  H01J37/063

Abstract: The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by an electron gun comprising a light source, a photocathode that emits an electron beam in response to receiving light from the light source, an anode, an electron-beam-shielding member with which it is possible to shield part of the electron beam, and a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.

公开(公告)号：US11417494B2

公开(公告)日：2022-08-16

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.

公开(公告)号：US11302507B2

公开(公告)日：2022-04-12

申请号：US16500789

申请日：2018-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Tomoaki Kawamata ,  Haruka Shikano

IPC: H01J1/94 ,  H01J3/02

Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.

公开(公告)号：US20210375578A1

公开(公告)日：2021-12-02

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.