Method for producing carbon- or graphite-foam parts

    公开(公告)号:US20220411270A1

    公开(公告)日:2022-12-29

    申请号:US17732445

    申请日:2022-04-28

    摘要: A method for producing carbon or graphite foam parts with high purity level for high-temperature insulation under vacuum or protective gas, as insulating material or as filter material, includes the following steps: introducing dry, foamable starch (1) into an open-top container (2) having a round or angular cross section, until the base (3) of the container (2) is covered amply and uniformly with starch (1); introducing the container (2) partly filled with starch (1) into an oven (4), and heating the container (2) to a foaming temperature of >180° C. over a prolonged period of several hours to foam the starch (1), until the container (2) has filled completely with carbon foam (6); withdrawing the container (2) from the oven (4) and extracting the carbon foam (6) after sufficient cooling, and optionally portioning the carbon foam (6) into carbon foam parts (6.1).

    PLASMA BOAT FOR RECEIVING WAFERS WITH REGULATED PLASMA DEPOSITION

    公开(公告)号:US20210363636A1

    公开(公告)日:2021-11-25

    申请号:US17251442

    申请日:2019-06-13

    发明人: Torsten KORNMEYER

    IPC分类号: C23C16/458 H01L21/673

    摘要: A plasma boat for receiving wafers with partial damping of the plasma deposition comprises a number of boat plates spaced apart in parallel, which are provided with wafer holders for receiving upright wafers, in order to securely hold the wafers during transport and during the depositing process in a coating chamber, and wherein the boat plates are mechanically connected to one another by electrically insulating spacers. This provides a plasma boat, with regulated plasma deposition, which ensures a deposition on wafers that is uniform over the surface area thereof and has a constant layer thickness. This is achieved by a damping element (12) being respectively arranged between the wafer holders (16) located parallel to one another, between adjacent boat plates (15), and electrically insulated with respect to the latter on spacer elements (2).